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Here differentially pumped grooves or scavenge grooves can completely eliminate leakage of air or particulates into the vacuum or clean environments. Air bearing should be supplied with air that is relatively free of particulates water and oil. Please reference the table of ISO air quality classes for what constitutes relatively clean. New Way recommends a quality class of four or the lower. DIRT QUALITY WATER OIL CLASS (Particle size in micron) Pressure Dew point > F (ppm. 6 (1240) 25 6 - +50 (1500) - (including vapor mg/m3) Please note that different types of air bearings are sensitive to different types of contamination.

Mass flow meters are an exception and do not require correction as they actually count molecules but are nearly 10 times the cost of conventional flow meters. Mass flow meters may take some time to settle to a correct reading. Figure 28 - Mass Flow Meter Figure 27 - Visi-float flow meter Note that the century flow meter clearly states standard cubic feet per hour SCFH on the gauge. Please be advised that this is only the case if the exit side of the flow meter is to atmospheric pressure. In air bearing applications flow meters are employed in the supply line to the bearing so the exit pressure from the gage is likely to be four to six times atmospheric pressure.

Air Quality Compressed air used to supply an air bearing must be properly cleaned and dried. Air bearing performance and useful lifetime greatly depends on the quality of the compressed air. An efficient system ensures minimum pressure loss, removal of contaminants such us water, oil, dirt, rust, and other foreign materials. Particles will not affect the performance or life of New Way® Porous Air Bearings, but oil and water will.

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Air Bearing Application and Design Guide Rev E - New Way (mfg)

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